Callibration grating TGX1

Callibration grating for lateral scanner callibration, detection of lateral nonlinearity and determining sharpness of the tip.

Parameters

Structure: Si

Pattern: Chessboard pattern of square column with undercut edges

Period: 3 ±0,05 um

Height: ~ 0,6 um

Chip size: 5 x 5 x 0,5 um

Effective area: middle of the square, 3x3 mm

Sharpness diameter of the edges: <10 nm